The Integrated Nanosystems Research Facility at The University of California, Irvine (INRF UCI) is dedicated to developing and promoting micro and nano technology through research, education and outreach.
The facility is a 8,600 square foot class 100/1,000/10,000 clean room equipped with all the major devices for micro and nano fabrication. Capabilities include such diverse disciplines such as MEMS, biology, chemistry, optics and physics equipped with all the major devices for micro and nano fabrication.
