Photolithography Overview for MEMS

Support Center for Microsystems Education
15
149660

This is a short overview of the photolithography processes used to fabricate micro-sized devices. This presentation was produced by the Southwest Center for Microsystems Education (SCME). A supporting Photolithography Overview Learning Module can be downloaded from SCME's website (http://scme-nm.org), Educational Materials.

Published by: Support Center for Microsystems Education Published at: 11 years ago Category: علمی و تکنولوژی
MEMS microtechnology photolithography photoresist lithography dideo دیدئو photolithography overview دیدئو dideo mems short processes fabricate microsized devicesthis presentation produced southwest center microsystems education scmea supporting learning module downloaded scmes website httpscmenmorg educational