Introduction to Photolithography - ( Negative or Positive Photoresist )



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Carlos gives you an introduction to Photolithography in the cleanroom of the Integrated Nanosystems Research Facility at UC Irvine. View the SOP documentation for the Laurell Photoresist Spinner http://www.inrf.uci.edu/sop-laurell-spinner/ To skip to any portion of this video, refer to the below chapters: 0:00:12 - Introduction 0:01:21 - Laurel Spinner: Logging in and pre-use examination 0:05:33 - Laurel Spinner: Loading a sample 0:08:59 - Laurel Spinner: Programming the spin speeds and running the tool 0:11:51 - Laurel Spinner: Unloading and baking 0:14:10 - Laurel Spinner: Clean up after processing 0:18:42 - Post spinning procedures 0:19:13 - Development of Su-8 0:22:20 - Disposal of waste

Published by: Inrfucirvine Published at: 9 years ago Category: علمی و تکنولوژی